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An ultraviolet-curable mold for sub-100-nm lithography
Author
S. J. Choi, P. J. Yoo, S. J. Baek, T. W. Kim, and H. H. Lee*
Journal
Journal of the American Chemical Society
Page number
125, 7744-7745 (2004) [Link]
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S. J. Choi, P. J. Yoo, S. J. Baek, T. W. Kim, and H. H. Lee*
Journal of the American Chemical Society
125, 7744-7745 (2004) [Link]